Molecular‐beam‐epitaxial growth ofn‐AlGaAs on clean Cl2‐gas etched GaAs surfaces and the formation of high mobility two‐dimensional electron gas at the etch‐regrown interfaces
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.108496
Reference15 articles.
1. Maskless etching of GaAs and InP using a scanning microplasma
2. Dot lithography for zero‐dimensional quantum wells using focused ion beams
3. Insitupattern formation and high quality overgrowth by gas source molecular beam epitaxy
4. Vacuum lithography forinsitufabrication of buried semiconductor microstructures
5. Improved Electron Mobility of Two-Dimensional Electron Gas Formed Area-Selectively in GaAs/AlGaAs Heterostructure by Focused Si Ion Beam Implantation and MBE Overgrowth
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1. Electronic properties of etched–regrown heterostructure interfaces;Journal of Crystal Growth;2003-04
2. Etching temperature dependent mobilities up to at chlorine etched and regrown interfaces;Physica E: Low-dimensional Systems and Nanostructures;2002-03
3. Characterization of in situ etched and molecular beam epitaxy regrown GaAs interfaces using capacitance–voltage measurements, far infrared spectroscopy, and magnetotransport measurements;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
4. Study of AlGaAs/GaAs quantum wells overgrown on in situ Cl[sub 2]-etched GaAs substrates;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;2000
5. Chlorine-Based Dry Etching of III/V Compound Semiconductors for Optoelectronic Application;Japanese Journal of Applied Physics;1998-02-15
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