A micromachined piezoelectric microgripper for manipulation of micro/nanomaterials

Author:

Shi Huaduo1,Shi Weiliang12ORCID,Zhang Ran3,Zhai Junyi2,Chu Jinkui3,Dong Shuxiang1ORCID

Affiliation:

1. Department of Materials Science and Engineering, College of Engineering, Peking University, Beijing 100871, China

2. Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, Beijing 100083, China

3. School of Mechanical Engineering, Dalian University of Technology, Dalian, Liaoning 116023, China

Funder

National Natural Science Foundation of China (NSFC)

Publisher

AIP Publishing

Subject

Instrumentation

Reference17 articles.

1. Micro-systems in biomedical applications

2. H. Y. Chan and W. J. Li, in Proceedings of IEEE International Conference on Robotics and Automation (IEEE, Taibei, 2003), Vol. 1, p. 288.

3. A. Bergander, W. Driesen, T. Varidel, and J. M. Breguet, in Proceedings of the Microrobotics for Biomanipulation Workshop, IEEE/RSJ International Conference on Intelligent Robots and Systems (IEEE, Las Vegas, 2003), p. 11.

4. PARVUS – miniaturised robot for improved flexibility in micro production

5. Development of a micro-manipulator based on piezoelectric-technology

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