Thickness dependence of crystal and optical characterization on ZnO thin film grown by atomic layer deposition
Author:
Affiliation:
1. Department of Nano-Optical Engineering, Korea Polytechnic University, Siheung 15073, Republic of Korea
Funder
National Research Foundation of Korea
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5025685
Reference27 articles.
1. Thickness dependence of optoelectronic properties in ALD grown ZnO thin films
2. Natively textured surface Al-doped ZnO-TCO layers with gradual oxygen growth for thin film solar cells via magnetron sputtering
3. Room temperature blue LED based on p-ZnO/(CdZnO/ZnO) MQWs/ n-ZnO
4. Microstructure, optical and electrical properties of Al-doped ZnO films grown by MOCVD
5. Synthesis of ZnO Nanostructures Using Sol-Gel Method
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