Author:
Cortázar O. D.,Megía-Macías A.,Vizcaíno-de-Julián A.
Reference15 articles.
1. Review on high current 2.45 GHz electron cyclotron resonance sources (invited)
2. Plasma-based ion implantation and deposition: a review of physics, technology, and applications
3. Plasma breakdown diagnostics with the biased disc of electron cyclotron resonance ion source
4. Using Langmuir probes to measure the plasma decay rates in pulsed RF magnetron discharges
5. C. Lyneis, J. Benitez, D. Leitner, J. Noland, M. Strohmeier, H. Koivisto, and O. Tarvainen, in Proceedings of the International Conference on ECR Ion Sources 2010, Grenoble, France, 2010, pp. 162–164.
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15 articles.
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