Characteristics of intense multispecies metallic ion beams extracted from plasma of a pulsed cathodic arc
Author:
Affiliation:
1. Irkutsk State University, Irkutsk 664003, Russia
Funder
Russian Foundation for Basic Research (RFBR)
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.5003941
Reference14 articles.
1. Vacuum arc ion sources-a brief historical review
2. Fabrication of a new type of optical medium with metallic nanolayers by ion implantation technique and vacuum evaporation
3. Development of vacuum arc ion sources for heavy ion accelerator injectors and ion implantation technology (invited)
4. Metal ion implantation for large scale surface modification
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2. Study on plasma ejection near the anode in a pulsed low-current vacuum discharge;EPL (Europhysics Letters);2020-02-11
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