Low‐temperature amorphous‐to‐crystalline transformation of CoSi2films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.99683
Reference12 articles.
1. Cobalt silicide layers on Si. I. Structure and growth
2. Interactions in the Co/Si thin‐film system. I. Kinetics
3. Temperature dependence of structural and electrical properties of Ta‐Si thin alloy films
4. Silicide formation and interdiffusion effects in Si-Ta, SiO2-Ta AND Si-PtSi-Ta thin film structures
5. Film‐Substrate Interaction in Si/Ta and Si / Ta2 O 5 Structures
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1. On the kinetics of platinum silicide formation;Applied Physics Letters;2011-02-21
2. Two routes to polycrystalline CoSi2 thin films by co-sputtering Co and Si;Applied Surface Science;2010-09
3. Effect of zirconium addition on formation of CoSi2 thin films;Journal of Materials Science;2005-08-25
4. Effect of sputtering input powers on CoSi2 thin films prepared by magnetron sputtering;Materials & Design;2005-06
5. Effect of annealing on CoSi2 thin films prepared by magnetron sputtering;Materials Science and Engineering: B;2005-05
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