Simulation and experimental study on compositional evolution of Li-Co in LiCoO2 thin films during sputter deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3597829
Reference35 articles.
1. Preferred Orientation of Polycrystalline LiCoO[sub 2] Films
2. Growth of HT-LiCoO2 thin films on Pt-metalized silicon substrates
3. Comparison between rf-sputtered and electron beam evaporated thin electrode and electrolyte films for application in rechargeable lithium microbateries
4. LiCoO2 thin-film cathodes grown by RF sputtering
5. Studies on the target conditioning for deposition of LiCoO2 films
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2. The Element Composition Variation in Lead Zirconate Titanate upon the Ion-Plasma Deposition: Experiment and Simulation;Physics of the Solid State;2019-07
3. Sputtered LiMn1.5Ni0.5O4 thin films for Li-ion micro-batteries with high energy and rate capabilities;Energy Storage Materials;2018-11
4. Dependence of the constitution, microstructure and electrochemical behaviour of magnetron sputtered Li–Ni–Mn–Co–O thin film cathodes for lithium-ion batteries on the working gas pressure and annealing conditions;International Journal of Materials Research;2017-11-10
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