High-precision compliant mechanism for lens XY micro-adjustment-Reference-Cited by-同舟云学术

High-precision compliant mechanism for lens XY micro-adjustment

Published:2020-03-01 Issue:3 Volume:91 Page:035004
ISSN:0034-6748
Container-title:Review of Scientific Instruments
language:en
Short-container-title:Review of Scientific Instruments

Author:

Zhao Lei¹,Yu Xinfeng¹²,Li Pengzhi³,Qiao Yanfeng¹

Affiliation:

1. Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Dongnanhu Road, 3888#, 130033 Changchun, People’s Republic of China

2. University of Chinese Academy of Sciences, Yuquan Road, 19#A, 100049 Beijing, People’s Republic of China

3. Robotics for Extreme Environments Lab (REEL), School of Electrical and Electronic Engineering, The University of Manchester, Manchester M139PL, United Kingdom

Funder

National Youth Foundation of China

Publisher

AIP Publishing

Subject

Instrumentation

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5141138

Reference21 articles.

1. Optimal design of a flexure hinge based XYφ wafer stage

2. Kinetostatic modeling of 3-RRR compliant micro-motion stages with flexure hinges

3. Development of a High-Bandwidth XY Nanopositioning Stage for High-Rate Micro-/Nanomanufacturing

4. A Novel Piezoactuated XY Stage With Parallel, Decoupled, and Stacked Flexure Structure for Micro-/Nanopositioning

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