Ion beam irradiated via‐connect through an insulating polymer layer
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.333164
Reference5 articles.
1. Forming electrical interconnections through semiconductor wafers
2. Laser‐formed connections using polyimide
3. Large conductivity changes in ion beam irradiated organic thin films
4. Ion‐beam‐induced conductivity in polymer films
5. Pulsed ion beam technique for measuring diffusion coefficient of a slow diffusant in polymers
Cited by 14 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Ion bombardment induced modification of polyvinyltrimethylsilane studied by XPS;Surface and Interface Analysis;1994-07
2. X-ray photoelectron spectroscopy and dark DC conductivity of argon-ion implanted organic films over a wide temperature range;Journal of Physics: Condensed Matter;1991-11-01
3. Improved surface properties of polymer materials by multiple ion beam treatment;Journal of Materials Research;1991-03
4. Ion-beam-assisted formation of interconnections into high temperature polymers;Applied Surface Science;1990-12
5. Influence of the temperature on the ion beam induced conductivity of polyimide;Applied Surface Science;1989-12
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