Demonstration of the high collection efficiency of a broadband Mo/Si multilayer mirror with a graded multilayer coating on an ellipsoidal substrate
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4929708
Reference18 articles.
1. X‐Ray Fluorescence Spectrometry
2. EUV emission from solids illuminated with a laser-plasma EUV source
3. Synthetic Multilayers as Bragg Diffractors for X-Rays and Extreme Ultraviolet: Calculations of Performance
4. Development and testing of EUV multilayer coatings for the atmospheric imaging assembly instrument aboard the Solar Dynamics Observatory
5. EUV multilayer mirrors with tailored spectral reflectivity
Cited by 3 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Multilayer X-ray interference structures;Physics-Uspekhi;2019-11-01
2. Reflectance measurement of EUV mirrors with s- and p-polarized light using polarization control units;International Conference on Extreme Ultraviolet Lithography 2018;2018-10-03
3. Aperiodic Mo/Si multilayers for hard x-rays;Optics Express;2016-08-04
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