Charging and trapping of macroparticles in near-electrode regions of fluorocarbon plasmas with negative ions
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1375149
Reference24 articles.
1. Diagnostics And Control Of High-Density Etching Plasmas
2. Diagnostic of Surface Wave Plasma for Oxide Etching in Comparison with Inductive RF Plasma
3. Measurement of negative-ion density in high-density C4F8 plasma using a laser photodetachment technique combined with a millimeter-wave open resonator
4. Molecular composition of films and solid particles polymerized in fluorocarbon plasmas
5. In situ laser diagnostic studies of plasma‐generated particulate contamination
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