Spectroscopic study of SiC‐like structures formed on polycrystalline silicon sheets during growth
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.356993
Reference39 articles.
1. Interface shape studies for silicon ribbon growth by the EFG technique
2. Ambient gas-induced SiC-like structures in edge-defined film-fed grown polycrystalline silicon samples
3. Single Crystal Epitaxial Growth of β-SiC for Device and Integrated Circuit Applications
4. InsituCr gettering in polycrystalline silicon sheets obtained by edge‐defined film‐fed growth
5. Influence of high‐temperature thermal treatment on edge‐defined film‐fed growth silicon
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