Monitoring of the ion energy and current density at the surface of films grown by excimer laser ablation
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.368097
Reference16 articles.
1. Hydrogen dissociation and incorporation into amorphous silicon produced by electron beam evaporation
2. Deposition of amorphous silicon films by laser ablation
3. Investigation of the behavior of particles generated from a laser-ablated silicon target using time-of-flight measurements
4. Low‐temperature synthesis of silicon oxide, oxynitride, and nitride films by pulsed excimer laser ablation
5. Generation of high‐energy atomic beams in laser‐superconducting target interactions
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