Microstructure and its effect on the conductivity of magnetron sputtered carbon thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1376413
Reference22 articles.
1. Mechanisms of intrinsic stress generation in amorphous carbon thin films prepared by magnetron sputtering
2. Hydrogen‐free amorphous carbon films approaching diamond prepared by magnetron sputtering
3. Tetrahedral amorphous carbon films prepared by magnetron sputtering and dc ion plating
4. Insights on the deposition mechanism of sputtered amorphous carbon films
5. Electron field emission from diamond and diamond-like carbon for field emission displays
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