Surface heterostructure nanomechanical actuators with atomic resolution
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2735675
Reference11 articles.
1. Critical Review: Adhesion in surface micromechanical structures
2. Stiction of surface micromachined structures after rinsing and drying: model and investigation of adhesion mechanisms
3. Stiction in surface micromachining
4. A physical model to predict stiction in MEMS
5. C. H. Mastrangelo and C. H. Hsu, IEEE Fifth Technical Digest of the 1992 Solid-State Sensor and Actuator Workshop, 1992, p. 208.
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