N doped ZnO (N:ZnO) film prepared by reactive HiPIMS deposition technique

Author:

Wang Zhengduo12,Li Qian1ORCID,Yuan Yan1,Yang Lizhen1,Zhang Haibao1,Liu Zhongwei1,Ouyang Jiting2ORCID,Chen Qiang1ORCID

Affiliation:

1. Lab of Plasma Physics and Materials, Beijing Institute of Graphic Communication, Beijing 102600, China

2. School of Physics, Beijing Institute of Technology, Beijing 100081, China

Funder

Beijing Municipal National Science Foundation

Collaboration Innovation Center of Green Printing and Publishing Technology

Natural Science Foundation of Beijing Municipal Education Commission

National Natural Science Foundation of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

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