Complementary negative capacitance field-effect transistors based on vertically stacked van der Waals heterostructures

Author:

Zhang Siqing1ORCID,Luo Zheng-Dong12ORCID,Gan Xuetao3ORCID,Zhang Dawei45ORCID,Yang Qiyu1,Tan Dongxin1,Wen Jie1,Liu Yan1,Han Genquan12,Hao Yue1ORCID

Affiliation:

1. State Key Discipline Laboratory of Wide Band Gap Semiconductor Technology, School of Microelectronics, Xidian University 1 , Xi'an 710071, China

2. Hangzhou Institute of Technology, Xidian University 2 , Hangzhou 311200, China

3. Key Laboratory of Light Field Manipulation and Information Acquisition, Ministry of Industry and Information Technology, and Shaanxi Key Laboratory of Optical Information Technology, School of Physical Science and Technology, Northwestern Polytechnical University 3 , Xi'an 710129, China

4. School of Materials Science and Engineering, UNSW Sydney 4 , Sydney, NSW 2052, Australia

5. ARC Centre of Excellence in Future Low-Energy Electronics Technologies (FLEET), UNSW Sydney 5 , Sydney, NSW 2052, Australia

Abstract

Complementary field-effect transistors (CFETs) with a vertically stacked n-FET/p-FET configuration can provide a promising solution to boost area efficiency. However, the substantial power dissipation exhibited by these CFET devices poses a notable challenge to the energy efficiency. By combining a negative-capacitance field-effect transistor (NCFET) and a CFET, the problem of excessive power consumption can be solved. By using a negative-capacitance gate stack, the supply voltage (Vdd) applied to the gate of the CFET is increased, resulting in a reduction in power consumption. Here, we experimentally demonstrate a vertically integrated complementary negative capacitance field-effect transistor (NC-CFET) that combines tungsten diselenide (WSe2) p-NCFET and molybdenum disulfide (MoS2) n-NCFET. With the hexagonal boron nitride/copper indium thiophosphate CuInP2S6 (CIPS) dielectric stack, both n-type and p-type van der Waals (vdW) NCFETs exhibit sub-60 mV/decade switching characteristics. The vdW NC-CFET exhibits a voltage gain of 78.34 and a power consumption of 129.7 pW at a supply voltage of 1 V. These device characteristics demonstrate the great potential of the vdW NC-CFET for high density and low power applications.

Funder

National Key Research and Development Program of China

National Natural Science Foundation of China

National Natural Science Foundation of China-Zhejiang Joint Fund for the Integration of Industrialization and Informatization

Fundamental Research Funds for the Central Universities

Key Research and Development Program of Zhejiang Province

Natural Science Basic Research Program of Shaanxi Province

Publisher

AIP Publishing

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