Experimental and theoretical investigations of the structure and the stability of the BNSi molecule
Author:
Publisher
AIP Publishing
Subject
Physical and Theoretical Chemistry,General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.479844
Reference25 articles.
1. Electrical and Mechanical Properties of Si-B-N Films Made by Plasma-Enhanced Chemical Vapor Deposition.
2. Properties of the B-Si-N ceramic thin films by plasma-CVD.
3. Improvement in the stability of amorphous SiN−BN films prepared by hybrid-plasma-enhanced chemical vapour deposition
4. A low-permittivity interconnection using an SiBN interlayer
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1. Thermodynamic study and preparation of Si–B–N ceramic coating by LPCVD from SiCl4–NH3–BCl3–H2–Ar system;Journal of Materials Research;2017-08-15
2. FTIR matrix isolation and ab initio investigations of the Si2N and BNSi molecules;Chemical Physics Letters;2001-07
3. Thermodynamic study of the gaseous molecules Al2N, AlN, and Al2N2 by Knudsen cell mass spectrometry;The Journal of Chemical Physics;2000-12-22
4. Knudsen cell mass spectrometric investigation of the B2N molecule;The Journal of Chemical Physics;2000-11-22
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