Experimental and theoretical studies on self-diffusion in amorphous germanium

Author:

Böckendorf Tim1ORCID,Kirschbaum Jan1ORCID,Kipke Felix1ORCID,Bougeard Dominique2ORCID,Hansen John Lundsgaard3ORCID,Larsen Arne Nylandsted3ORCID,Posselt Matthias4ORCID,Bracht Hartmut1ORCID

Affiliation:

1. Institute of Materials Physics, University of Münster 1 , 48149 Münster, Germany

2. Institut für Experimentelle und Angewandte Physik, Universität Regensburg 2 , 93040 Regensburg, Germany

3. Department of Physics and Astronomy, Aarhus University 3 , 8000 Aarhus, Denmark

4. Helmholtz-Zentrum Dresden-Rossendorf 4 , 01328 Dresden, Germany

Abstract

Self-diffusion in amorphous germanium is studied at temperatures between 325 and 370 °C utilizing amorphous isotopically controlled germanium multilayer structures. The isotope multilayer is epitaxially grown on a single crystalline germanium-on-insulator structure by means of molecular beam epitaxy and subsequently amorphized by self-ion implantation. After heat treatment, the diffusional broadening of the isotope structure is measured with time-of-flight secondary ion mass spectrometry. The temperature dependence of self-diffusion is accurately described by the Arrhenius equation with the activation enthalpy Q = (2.21 ± 0.12)  eV and pre-exponential factor D0=(2.32−2.10+20.79) cm2 s−1. The activation enthalpy equals the activation enthalpy of solid phase epitaxial recrystallization (SPER). This agreement suggests that self-diffusion in amorphous germanium is similar to SPER, also mainly mediated by local bond rearrangements. Classical molecular dynamics simulations with a modified Stillinger–Weber-type interatomic potential yield results that are consistent with the experimental data and support the proposed atomic mechanism.

Funder

Deutsche Forschungsgemeinschaft

Publisher

AIP Publishing

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