Nonlinear enhancement of plasma density in linear combination of multiple collisional internal inductively coupled plasma sources
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3486200
Reference26 articles.
1. Development of internal-antenna-driven large-area RF plasma sources using multiple low-inductance antenna units
2. Novel high-density plasma tool for large area flat panel display etching
3. An array of inductively coupled plasma sources for large area plasma
4. Design and performance of distributed helicon sources
5. Large-area helicon plasma source with permanent magnets
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