1. Delft Institute of Microsystems and Nanoelectronics, Delft University of Technology, 2628 CT Delft, The Netherlands
2. Department of Mechanical and Aerospace Engineering, Monash University, Clayton, 3800 VIC, Australia
3. Centre for High Resolution Electron Microscopy, Delft University of Technology, 2628 CJ Delft, The Netherlands
4. Department of Microsystems Engineering (IMTEK), University of Freiburg Georges-Kohler-Allee 103, D-79110 Freiburg, Germany
5. International Iberian Nanotechnology Laboratory (INL), Avenida Mestre Jose Veiga, 4715-330 Braga, Portugal