A simple, high current gold ion source
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Published:1974-08
Issue:8
Volume:45
Page:1030-1032
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ISSN:0034-6748
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Container-title:Review of Scientific Instruments
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language:en
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Short-container-title:Review of Scientific Instruments
Cited by
3 articles.
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1. Simple, high current, antimony ion source;Review of Scientific Instruments;1979-01
2. Ion Beam Deposition;Thin Film Processes;1978
3. Ion Implantation;Semiconducting Devices;1976