Levitation and collection of diamond fine particles in the rf plasma chamber equipped with a hot filament
Author:
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3655443
Reference16 articles.
1. Particulate formation and dusty plasma behaviour in argon-silane RF discharge
2. Growth, structure, and transport properties of thin (>10 nm) n-type microcrystalline silicon prepared on silicon oxide and its application to single-electron transistor
3. Gravity Compensation in Complex Plasmas by Application of a Temperature Gradient
4. Dusty plasmas
Cited by 2 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Direct current dielectric barrier assistant discharge to get homogeneous plasma in capacitive coupled discharge;Physics of Plasmas;2014-06
2. Synthesis of diamond fine particles on levitated seed particles in a rf CH4/H2 plasma chamber equipped with a hot filament;Journal of Applied Physics;2012-10
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