Breakdown of anomalous channeling with ion energy for accurate strain determination in GaN-based heterostructures

Author:

Redondo-Cubero A.,Lorenz K.,Gago R.,Franco N.,Fernández-Garrido S.,Smulders P. J. M.,Muñoz E.,Calleja E.,Watson I. M.,Alves E.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Cited by 8 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Strain detection in crystalline heterostructures using bidimensional blocking patterns of channelled particles;Journal of Physics D: Applied Physics;2018-02-22

2. Implantation damage formation in a-, c- and m-plane GaN;Acta Materialia;2017-01

3. Ion beam analysis: New trends and challenges;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2014-07

4. On the origin of strain relaxation in epitaxial CdZnO layers;Oxide-based Materials and Devices IV;2013-03-18

5. Ion beams as a tool for the characterization of near-pseudomorphic CdZnO epilayers;SPIE Proceedings;2012-02-09

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