Enhancement of the reflectivity of Mo/Si multilayer x‐ray mirrors by thermal treatment
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.104835
Reference14 articles.
1. Molybdenum-silicon multilayer mirrors for the extreme ultraviolet
2. Comparison Among Multilayer Soft X-Ray Mirrors Fabricated By Electron Beam, Dc-, Rf-Magnetron Sputtering And Ion Beam Sputtering Deposition
3. Suppression of columnar-structure formation in Mo-Si layered synthetic microstructures
4. Measurement of soft x‐ray multilayer mirror reflectance at normal incidence using laser‐produced plasmas
5. Double pass amplification of laser radiation at 131 Å
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