1. Center of Nanoelectronics, School of Microelectronics, Shandong University, Jinan 250100, People's Republic of China
2. State Key Laboratory of ASIC and Systems, Fudan University, Shanghai 200433, People's Republic of China
3. State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, People's Republic of China
4. Key Laboratory for Precision and Non-traditional Machining Technology of the Ministry of Education, Dalian University of Technology, Dalian 116024, People's Republic of China
5. Department of Microelectronic Science and Engineering, Faculty of Science, Ningbo University, Ningbo 315211, People's Republic of China
6. Department of Materials Science, Fudan University, Shanghai 200433, People's Republic of China