A co-fired multilayer PMnS-PZT ceramic based linear piezoelectric ultrasonic micromotor with a high-load-density
Author:
Affiliation:
1. School of Materials Science and Engineering, Peking University, Beijing 100871, China
2. Institute for Advanced Study, Shenzhen University, Shenzhen 518051, China
Abstract
Funder
National High-tech Research and Development Program
National Natural Science Foundation of China
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
https://aip.scitation.org/doi/pdf/10.1063/5.0084187
Reference35 articles.
1. Piezoelectric Actuators and Motors: Materials, Designs, and Applications
2. Designing Artificial Vibration Modes of Piezoelectric Devices Using Programmable, 3D Ordered Structure with Piezoceramic Strain Units
3. Efficient Control of a Piezoelectric Linear Actuator Embedded Into a Servo-Valve for Aeronautic Applications
4. A Lightweight Surface Milli-Walker Based on Piezoelectric Actuation
5. A standing wave linear ultrasonic motor operating in in-plane expanding and bending modes
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