A co-fired multilayer PMnS-PZT ceramic based linear piezoelectric ultrasonic micromotor with a high-load-density

Abstract

In this work, we report a cofired-12-layer ceramic based standing-wave linear piezoelectric ultrasonic micromotor (SW-LPUM) with a high-load-density using LiCO3 doped 0.05Pb(Mn1/3Sb2/3)O3-0.47PbZrO3-0.48PbTiO3 (PMnS-PZT) material. The proposed SW-LPUM features a miniaturized structure (12.45 × 5.3 × 3.5 mm3) and excellent comprehensive actuation performances, such as fast response time (0.05 ms), high resolution (50 nm), and broad adjustable velocity range (from 0.01 to 123.7 mm s−1). Specifically, its high load density (11.0 mN mm−3) under a single-phase voltage drive is higher than that of most reported LPUMs. The elaborate multilayer structure based on hard-type PMnS-PZT ceramic enables the micromotor to continuously operate without obvious temperature rise, showing its practical value for high-precision positioning.