Microguns with 100-V electron beams
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.122363
Reference4 articles.
1. Microminiaturization of electron optical systems
2. Electron-beam microcolumns for lithography and related applications
3. Field emission from nanotips
4. Interactions of low-energy coherent electron beams with nano-scale objects: a study by Fresnel projection microscopy
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