Growth and thermal decomposition of ultrathin ion‐beam deposited C:H films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.358774
Reference16 articles.
1. rf‐plasma deposited amorphous hydrogenated hard carbon thin films: Preparation, properties, and applications
2. Bonding in hydrogenated hard carbon studied by optical spectroscopy
3. Mechanism of chemical erosion of sputter‐deposited C:H films
4. Spectroscopic identification of CH species in C:H films using HREELS
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