Modeling of thesp3/sp2ratio in ion beam and plasma‐deposited carbon films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.106026
Reference18 articles.
1. Subplantation model for film growth from hyperthermal species: Application to diamond
2. Subplantation model for film growth from hyperthermal species
3. Ion Beam and Ion-Assisted Deposition of Diamond-Like Carbon Films
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