Dopant-selective etch stops in 6H and 3C SiC
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.363890
Reference9 articles.
1. Growth and Characterization of Cubic SiC Single‐Crystal Films on Si
2. Laser‐Assisted Photoelectrochemical Etching of n‐type Beta ‐ SiC
3. Broad‐Area Photoelectrochemical Etching of n‐Type Beta ‐ SiC
4. Direct observation of porous SiC formed by anodization in HF
5. Photoelectrochemical conductivity selective etch stops for SiC
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