Raman microprobe analysis during the direct laser writing of silicon microstructures
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96941
Reference12 articles.
1. Wafer‐scale laser pantography: Fabrication ofn‐metal‐oxide‐semiconductor transistors and small‐scale integrated circuits by direct‐write laser‐induced pyrolytic reactions
2. Laser microreaction for deposition of doped silicon films
3. Ar+laser induced chemical vapor deposition of Si from SiH4
4. Anharmonic effects in light scattering due to optical phonons in silicon
5. Resonance Raman scattering in Si at elevated temperatures
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