Atomic force microscopy growth modeling of SiC buffer layers on Si(100) and quality optimization
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.363453
Reference28 articles.
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5. Effect of Carbonization Gas Precursor on the Heteroepitaxial Growth of Sic-on-Si by Rtcvd
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