1. School of Mechanical and Automotive Engineering, Xiamen University of Technology 1 , Xiamen 361024, China
2. Laboratory of Precision Actuation and Transmission of Fujian Province University 2 , Xiamen 361024, China
3. College of Mechanical Engineering and Automation, Huaqiao University 3 , Xiamen 361021, China
4. Pen-Tung Sah Institute of Micro-Nano Science and Technology, Xiamen University 4 , Xiamen 361102, China