Affiliation:
1. Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
Funder
Grant-in Aid for Scientific Research (S) of MEXT
Grant-in Aid for Young Scientists (A) of MEXT
JSPS Core-to-Core Program of International Collaborative Research Center on Atomically Controlled Processing for Ultralarge Scale Integration
Subject
General Physics and Astronomy
Cited by
9 articles.
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