Realization and performance evaluation of high speed autofocusing for direct laser lithography
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3176468
Reference15 articles.
1. Fabrication of continuous-relief micro-optical elements by direct laser writing in photoresists
2. Laser beam lithographed micro-Fresnel lenses
3. Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure
4. Coupling of surface roughness to the performance of computer-generated holograms
5. 300 mm reference wafer fabrication by using direct laser lithography
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