Effect of SiO2surface chemistry on the oxidation of silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.101469
Reference9 articles.
1. Experimental Observations of the Chemistry of the SiO2/Si Interface
2. The Influence of Silicon Surface Cleaning Procedures on Silicon Oxidation
3. Effect of silicon surface cleaning procedures on oxidation kinetics and surface chemistry
4. Thermal oxidation of silicon: Chemisorption and linear rate constant
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