1. Department of Mechanical Engineering, Istanbul Technical University, Istanbul, Türkiye
2. MEMS Research Center, Istanbul Technical University, Istanbul, Türkiye
3. Faculty of Electrical and Computer Engineering, University of Tabriz, Tabriz, Iran
4. Department of Mechanical Engineering, Tabriz Branch, Islamic Azad University, Tabriz, Iran
5. Department of Mechanical Engineering, University of Tabriz, Tabriz, Iran