Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition-Reference-Cited by-同舟云学术

Radio frequency plasma power dependence of the moisture permeation barrier characteristics of Al2O3 films deposited by remote plasma atomic layer deposition

Published:2013-11-07 Issue:17 Volume:114 Page:173511
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Jung Hyunsoo,Choi Hagyoung,Jeon Heeyoung,Lee Sanghun,Jeon Hyeongtag

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4829031

Reference26 articles.

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