Erratum: “Reducing solid conduction in electrothermally driven MEMS Pirani gauge using integrated polymeric thin film” [Appl. Phys. Lett. 120(8), 084101 (2022)]-Reference-Cited by-同舟云学术

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Erratum: “Reducing solid conduction in electrothermally driven MEMS Pirani gauge using integrated polymeric thin film” [Appl. Phys. Lett. 120(8), 084101 (2022)]

Published:2023-10-02 Issue:14 Volume:123 Page:
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:

Author:

Garg Manu¹²^ORCID,Arya Dhairya S.¹^ORCID,Kumar Sushil¹^ORCID,Chiu Yi²³^ORCID,Singh Pushpapraj¹^ORCID

Affiliation:

1. Centre for Applied Research in Electronics (CARE), Indian Institute of Technology 1 Delhi, New Delhi 110016, India

2. International College of Semiconductor Technology (ICST), National Yang Ming Chiao Tung University 2 , Hsinchu 30010, Taiwan

3. Department of Electrical and Computer Engineering, National Yang Ming Chiao Tung University 3 , Hsinchu 30010, Taiwan

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

https://pubs.aip.org/aip/apl/article-pdf/doi/10.1063/5.0176885/18154092/149901_1_5.0176885.pdf

Reference1 articles.

1. Reducing solid conduction in electrothermally driven MEMS Pirani gauge using integrated polymeric thin film;Appl. Phys. Lett.,2022

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