Calibrated nanoscale dopant profiling using a scanning microwave microscope-Reference-Cited by-同舟云学术

Calibrated nanoscale dopant profiling using a scanning microwave microscope

Published:2012-01 Issue:1 Volume:111 Page:014301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Huber H. P.,Humer I.,Hochleitner M.,Fenner M.,Moertelmaier M.,Rankl C.,Imtiaz A.,Wallis T. M.,Tanbakuchi H.,Hinterdorfer P.,Kabos P.,Smoliner J.,Kopanski J. J.,Kienberger F.

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.3672445

Reference23 articles.

1. Quantitative scanning near-field microwave microscopy for thin film dielectric constant measurement

2. Atomic-force-microscope-compatible near-field scanning microwave microscope with separated excitation and sensing probes

3. Modeling and characterization of a cantilever-based near-field scanning microwave impedance microscope

4. Metrology For High-Frequency Nanoelectronics

5. Scanning microwave microscopy/spectroscopy on metal-oxide-semiconductor systems

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