Sub-10 nm lateral spatial resolution in scanning capacitance microscopy achieved with solid platinum probes
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1641161
Reference15 articles.
1. TWO-DIMENSIONAL DOPANT PROFILING BY SCANNING CAPACITANCE MICROSCOPY
2. Epitaxial staircase structure for the calibration of electrical characterization techniques
3. Scanning capacitance microscopy measurements and modeling: Progress towards dopant profiling of silicon
4. Comparison of experimental and theoretical scanning capacitance microscope signals and their impact on the accuracy of determined two-dimensional carrier profiles
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