A study of hydrogenated amorphous silicon deposited by rf glow discharge in silane‐hydrogen mixtures
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.334191
Reference40 articles.
1. The Preparation and Properties of Amorphous Silicon
2. Effects of inert gas dilution of silane on plasma‐deposited a‐Si:H films
3. Glow discharge produced amorphous silicon solar cells
4. Glow discharge preparation of amorphous hydrogenated silicon from higher silanes
5. High performance hydrogenated amorphous silicon solar cells made at a high deposition rate by glow discharge of disilane
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