Structural characterization and modeling of damage accumulation in In implanted Si
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1631076
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1. Ge Ion Implanted Photonic Devices and Annealing for Emerging Applications;Micromachines;2022-02-12
2. Erasable diffractive grating couplers in silicon on insulator for wafer scale testing;Silicon Photonics IX;2014-03-08
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4. Direct observation of indium precipitates in silicon following high dose ion implantation;Semiconductor Science and Technology;2013-11-07
5. Low-energy silicon-on-insulator ion implanted gratings for optical wafer scale testing;SPIE Proceedings;2011-02-10
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