Fabrication of piezodriven, free-standing, all-oxide heteroepitaxial cantilevers on silicon
Author:
Publisher
AIP Publishing
Subject
General Engineering,General Materials Science
Link
http://scitation.aip.org/deliver/fulltext/aip/journal/aplmater/2/9/1.4893355.pdf?itemId=/content/aip/journal/aplmater/2/9/10.1063/1.4893355&mimeType=pdf&containerItemId=content/aip/journal/aplmater
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1. Lead-free at last
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