Deep ultraviolet enhanced wet chemical etching of gallium nitride
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120879
Reference22 articles.
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4. Emerging gallium nitride based devices
5. Silicon Wafer Direct Bonding through the Amorphous Layer
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