Author:
Mazeika Dalius,Bansevicius Ramutis,Jurenas Vytautas,Kulvietis Genadijus,Borodinas Sergejus
Reference18 articles.
1. K. Uchino, J. Giniewicz, Micromechatronics, Marcel Dekker Inc., New York, 2003.
2. A Survey of Modeling and Control of Piezoelectric Actuators
3. M. S. Vijaya, Piezoelectric Materials and Devices: Applications in Engineering and Medical Sciences, CRC Press, 2016.
4. Hwa Soo Kim, Young Man Cho, Design and modeling of a novel 3-DOF precision micro-stage, Mechatronics, Vol. 19, No. 2009, pp. 598–608.
5. Identification, control and hysteresis compensation of a 3 DOF metrological AFM
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