Publisher
American Institute of Physics
Reference3 articles.
1. S. E. Alper and T. Akin, “A planar gyroscope using standard surface micromachining process” in The 14th European conference on solid-state transducers, Copenhagen, Denmark, 2000, pp. 387–390.
2. Fabrication of two-gimbal Ni–Fe torsional micro-gyroscope by SU-8 based UV-LIGA process
3. www.polytec.com