Theoretical analysis of induction heating in high-temperature epitaxial growth system

Author:

Mei Shuzhe12ORCID,Wang Quan13,Hao Meilan124,Xu Jiankai12,Yin Haibo12,Xiao Hongling12,Feng Chun12,Jiang Lijuan12,Wang Xiaoliang12ORCID,Liu Fengqi12,Xu Xiangang3,Wang Zhanguo12

Affiliation:

1. Key Lab of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, People’s Republic of China

2. University of Chinese Academy of Sciences, Beijing 100049, People’s Republic of China

3. State Key Laboratory of Crystal Materials, Shandong University, Jinan 250100, People’s Republic of China

4. School of Information & Electrical Engineering, Hebei University of Engineering, Handan 056038, People’s Republic of China

Funder

The National Key R&D Program of China

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Cited by 4 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Temperature Field Simulation and optimization for Horizontal 6-inch 4H-SiC Epitaxial CVD Reactor by Induction Heating;2023 24th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE);2023-04-17

2. Promoting induction heating – steam generators for medical sterilisation;Engineering review;2022

3. Radio Frequency Induction Welding of Silver Nanowire Networks for Transparent Heat Films;Materials;2021-08-08

4. Energy saving analysis of medical steam sterilizer;AMT2020: THE 6TH INTERNATIONAL CONGRESS ON THERMAL SCIENCES;2021

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