Ion‐implantation‐damage gettering effect in silicon photodiode array camera target
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1654624
Reference5 articles.
1. VACANCY CLUSTERS IN DISLOCATION‐FREE SILICON
2. Poisoning and Gettering Effects in Silicon Junctions
3. Gettering rates of various fast‐diffusing metal impurities at ion‐damaged layers on silicon
4. The Displacement of Atoms in Solids by Radiation
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2. Anomalous Fe diffusion in Si-ion-implanted β–Ga2O3 and its suppression in Ga2O3 transistor structures through highly resistive buffer layers;Applied Physics Letters;2015-01-19
3. Intrinsic gettering of Czochralski silicon annealed in argon and nitrogen atmosphere;Physica B: Condensed Matter;2001-12
4. Kinetics and thermodynamics constraints in Pt gettering by P diffusion in Si;Journal of Applied Physics;1996-07
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